带驻留约束及双臂机械手的集束型设备群调度算法

上海交通大学学报（自然版） ›› 2013, Vol. 47 ›› Issue (04): 650-655.

• 自动化技术、计算机技术 • 上一篇下一篇

带驻留约束及双臂机械手的集束型设备群调度算法

石潇铭, 周炳海

(同济大学机械与能源工程学院，上海 201804)

收稿日期:2012-03-19 出版日期:2013-04-28 发布日期:2013-04-28
基金资助:
国家自然科学基金资助项目（71071115）

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

SHI Xiao-Ming, ZHOU Bing-Hai

(College of Mechanical and Energy Engineering, Tongji University, Shanghai 201804, China)

Received:2012-03-19 Online:2013-04-28 Published:2013-04-28

摘要/Abstract

摘要： 根据集束型设备群的特点，对调度问题域进行描述，并提出了带驻留约束的双臂集束型设备群调度算法.该算法利用分解方法将集束型设备群分解为多个单集束型设备，并在此基础上提出一种基于机械手无冲突约束的搜索调度算法，调度目标是使到达晶圆在最短基本周期内完成加工.仿真实验分析结果表明，用所提出的算法进行集束型设备群的晶圆处理是有效的.

关键词: 集束型设备群, 驻留约束, 分解, 调度, 仿真实验

Abstract: According to characteristics of the cluster tools, a problem domain of the scheduling was supposed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi-cluster tools.

Key words: multi-cluster tools, residency constraints, decomposition, scheduling, simulation experiments

中图分类号:

TP 391.9

石潇铭, 周炳海. 带驻留约束及双臂机械手的集束型设备群调度算法[J]. 上海交通大学学报（自然版）, 2013, 47(04): 650-655.

SHI Xiao-Ming, ZHOU Bing-Hai. Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints[J]. Journal of Shanghai Jiaotong University, 2013, 47(04): 650-655.

参考文献

［1］Perkinson T L, Gyurcsik R S, McLarty P K. Singlewafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation sequences on throughput ［J］. IEEE Transactions on Semiconductor Manufacturing, 1996, 9(3): 384400.
［2］Venkatesh S, Davenport R, Foxhoven P, et al. A steadystate throughput analysis of cluster tools : Dualblade versus singleblade robots［J］.IEEE Transactions on Semiconductor Manufacturing, 1997, 10(4): 418424.
［3］Yoon H J, Lee D Y. Online scheduling of integrated singlewafer processing tools with temporal constraints ［J］. Transactions on Semiconductor Manufacturing, 2005, 18(3): 390398.
［4］Ding S, Yi J , Zhang M T. Multicluster tools scheduling: An integrated event graph and network model approach ［J］. IEEE Transactions on Semiconductor Manufacturing, 2006, 19(3): 339351.
［5］Yi J G, Ding S W, Song D, et al. Steadystate throughput and scheduling analysis of multicluster tools: An decomposition approach ［J］. IEEE Transactions on Automation Science and Engineering, 2008, 5(2): 321336.
［6］Chan W K V, Yi J, Ding S. On the optimality of oneunit cycle scheduling of multicluster tools with singleblade robots［C］∥ Proceedings of the 3rd Annual IEEE Conference on Automation Science and Engineering. Scottsdale, USA：IEEE, 2007: 392397.
［7］Rostami S,Hamidzadeh B. Optimal scheduling techniques for cluster tools with processmodule and transportmodule residency constraints ［J］. IEEE Transactions on Semiconductor Manufacturing, 2002, 15(3): 341349.
［8］Rostami S, Hamidzadeh B. An optimal residencyaware scheduling technique for cluster tools with buffer module ［J］. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(1): 6873.
［9］Kim J H, Lee H T, Lee H Y, et al. Schedulability analysis of timeconstrained cluster tools with bounded time variation by an extended Petri Net［J］. IEEE Transactions Automation Science and Engineering, 2008, 5(3): 490503.
［10］Wu N, Chu C, Chu F. Modeling and schedulability analysis of singlearm cluster tools with wafer residency time constraints using Petri net［C］∥ Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control. Sanya, China:IEEE, 2008：8489.
［11］刘明祥，周炳海.基于时间约束集的集束型设备群调度方法［J］.自动化学报,2012,38(3):479485.
LIU Mingxiang, ZHOU Binghai. Scheduling algorithm of cluster tools based on time constraint ［J］. Acta Automatica Sinica, 2012, 38(3):479485.
［12］李鑫,周炳海,陆志强.基于事件驱动的集束型晶圆制造设备调度算法［J］.上海交通大学学报, 2009,43(6):898901.
LI Xin, ZHOU Binghai, LU Zhiqiang. Scheduling algorithm for cluster tools of wafer fabrications based on eventsdriven ［J］. Journal of Shanghai Jiaotong University, 2009, 43(6): 898901.

[1]	刘亚辉, 申兴旺, 顾星海, 彭涛, 鲍劲松, 张丹. 面向柔性作业车间动态调度的双系统强化学习方法[J]. 上海交通大学学报, 2022, 56(9): 1262-1275.
[2]	李林晏, 韩爽, 乔延辉, 李莉, 刘永前, 阎洁, 刘海东. 面向高比例新能源并网场景的风光-电动车协同调度方法[J]. 上海交通大学学报, 2022, 56(5): 554-563.
[3]	邱杰凯, 丁肇伟, 宋春雨, 陈龙珠. 成层广义Gibson地基中桩的水平动力响应[J]. 上海交通大学学报, 2022, 56(4): 431-442.
[4]	赵勇, 苏丹. 基于4种长短时记忆神经网络组合模型的畸形波预报[J]. 上海交通大学学报, 2022, 56(4): 516-522.
[5]	汤洪涛, 王丹南, 邵益平, 赵文彬, 江伟光, 陈青丰. 基于改进候鸟迁徙优化的多目标批量流混合流水车间调度[J]. 上海交通大学学报, 2022, 56(2): 201-213.
[6]	陆秋瑜, 于珍, 杨银国, 李力. 考虑源荷功率不确定性的海上风力发电多微网两阶段优化调度[J]. 上海交通大学学报, 2022, 56(10): 1308-1316.
[7]	孙翀, 田甜, 竺晓程, 杜朝辉. 风力机翼型非定常流场POD和EPOD分析[J]. 上海交通大学学报, 2022, 56(1): 45-52.
[8]	王兴志, 翟海保, 严亚勤, 吴庆曦. 基于数字孪生和深度学习的新一代调控系统预调度方法[J]. 上海交通大学学报, 2021, 55(S2): 37-41.
[9]	许凌, 王兴志, 肖林朋. 基于语义特征抓取电网调度事件的检测技术[J]. 上海交通大学学报, 2021, 55(S2): 86-91.
[10]	郭志远, 虞培祥, 欧阳华. 基于大涡模拟的圆柱绕流剪切层不稳定性[J]. 上海交通大学学报, 2021, 55(8): 924-933.
[11]	范厚明, 于佳琪, 马梦知, 蒋晓丹, 慈吉利, 翟志伟. 模糊时间窗下多船型不定期船调度与航速联合优化[J]. 上海交通大学学报, 2021, 55(3): 297-310.
[12]	吕祥梅, 刘天琪, 刘绚, 何川, 南璐, 曾红. 考虑高比例新能源消纳的多能源园区日前低碳经济调度[J]. 上海交通大学学报, 2021, 55(12): 1586-1597.
[13]	郑奕扬, 倪何, 金家善. 基于MSOP的蒸汽动力系统单参数运行稳定性评估方法[J]. 上海交通大学学报, 2021, 55(11): 1438-1444.
[14]	卓鹏程, 严瑾, 郑美妹, 夏唐斌, 奚立峰. 面向滚动轴承全生命周期故障诊断的GA-OIHF Elman神经网络算法[J]. 上海交通大学学报, 2021, 55(10): 1255-1262.
[15]	王金凤, 陈璐, 杨雯慧. 考虑设备可用性约束的单机调度问题[J]. 上海交通大学学报, 2021, 55(1): 103-110.

带驻留约束及双臂机械手的集束型设备群调度算法

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价