带驻留约束及双臂机械手的集束型设备群调度算法

上海交通大学学报（自然版） ›› 2013, Vol. 47 ›› Issue (04): 650-655.

• 自动化技术、计算机技术 • 上一篇下一篇

带驻留约束及双臂机械手的集束型设备群调度算法

石潇铭, 周炳海

(同济大学机械与能源工程学院，上海 201804)

收稿日期:2012-03-19 出版日期:2013-04-28 发布日期:2013-04-28
基金资助:
国家自然科学基金资助项目（71071115）

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

SHI Xiao-Ming, ZHOU Bing-Hai

(College of Mechanical and Energy Engineering, Tongji University, Shanghai 201804, China)

Received:2012-03-19 Online:2013-04-28 Published:2013-04-28

摘要/Abstract

摘要： 根据集束型设备群的特点，对调度问题域进行描述，并提出了带驻留约束的双臂集束型设备群调度算法.该算法利用分解方法将集束型设备群分解为多个单集束型设备，并在此基础上提出一种基于机械手无冲突约束的搜索调度算法，调度目标是使到达晶圆在最短基本周期内完成加工.仿真实验分析结果表明，用所提出的算法进行集束型设备群的晶圆处理是有效的.

关键词: 集束型设备群, 驻留约束, 分解, 调度, 仿真实验

Abstract: According to characteristics of the cluster tools, a problem domain of the scheduling was supposed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi-cluster tools.

Key words: multi-cluster tools, residency constraints, decomposition, scheduling, simulation experiments

中图分类号:

TP 391.9

石潇铭, 周炳海. 带驻留约束及双臂机械手的集束型设备群调度算法[J]. 上海交通大学学报（自然版）, 2013, 47(04): 650-655.

SHI Xiao-Ming, ZHOU Bing-Hai. Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints[J]. Journal of Shanghai Jiaotong University, 2013, 47(04): 650-655.

参考文献

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带驻留约束及双臂机械手的集束型设备群调度算法

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

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