单晶硅表面有机硅烷/稀土复合自组装膜的摩擦磨损性能

摘要/Abstract

摘要： 利用分子自组装技术，在单晶硅表面制备了MPTSMPTES /稀土复合自组装膜.利用接触角测定仪、原子力显微镜和X射线光电子能谱仪分析表征了薄膜的组成和结构；采用DF-PM型静-动摩擦系数精密测定仪评价了薄膜的摩擦磨损性能.研究结果表明：稀土元素可以组装到氧化后的硅烷化表面而形成MPTS-MPTES /稀土自组装复合薄膜.在较低载荷下，薄膜不但摩擦系数较低，同时也表现出良好的耐磨性和摩擦稳定性，显示了其在微型机械表面改性的潜在应用前景.

关键词: , 有机硅烷；稀土；单晶硅；自组装分子膜；摩擦磨损性能

Abstract: The composite film of nanometer rare-earth/silicon coupling reagent MPTS-MPTES was prepared on the hydroxylated single-crystal silicon substrate by a self-assembling process from specially formulated solution. The resultant composite film was characterized by means of atomic force microscope (AFM) and X-ray photoelectron spectroscopy (XPS). The contact angles of distilled water on the silane SAMs and the composite film were measured to compare the surface states. The tribological properties of the films sliding against GCr15 steel ball were evaluated on a DF-PM static-dynamic friction and wear tester. The experimental results show that rare earth (RE) can be easily incorporated in the MPTS-MPTES SAMs and lead to changed surface state of the composite film. Moreover, MPTS-MPTES / RE composite film is effective in reducing friction and resisting wear compared with MPTS-MPTES SAM as it slides against the steel counterpart at a small load, indicating its promising applications in microelectromechanical system (MEMS) field.

Key words: organic silane, rare earth (RE), selfassembled monolayer film, singlecrystal silicon, friction and wear behavior

中图分类号:

TH117.3

李振华1,程先华2. 单晶硅表面有机硅烷/稀土复合自组装膜的摩擦磨损性能[J]. 上海交通大学学报（自然版）, 2011, 45(11): 1577-1580.

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