上海交通大学学报

上海交通大学学报（自然版）

• 机械工程 • 上一篇    下一篇

一种有机硅烷/稀土复合薄膜制备及纳米摩擦学性能

杨倩倩，程先华，亓永   

  1. （上海交通大学 机械与动力工程学院， 上海 200240）
  • 收稿日期:2009-09-28 修回日期:1900-01-01 出版日期:2010-04-29 发布日期:2010-04-29

Preparation and Nanotribological Behavior of APTES/Rareearth Composite Film

YANG Qianqian，CHENG Xianhua，QI Yong   

  1. （School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China）
  • Received:2009-09-28 Revised:1900-01-01 Online:2010-04-29 Published:2010-04-29

摘要： 采用分子自组装技术在单晶硅基底上制备了有机硅烷/稀土（APTES/RE）复合薄膜.利用椭圆偏振仪、接触角测量仪及X射线光电子能谱(XPS)仪分析表征了薄膜的结构，并采用原子力显微镜（AFM）研究了硅基片和复合薄膜的纳米摩擦学性能.结果表明：随着探针的滑动速度和载荷的增加，针尖与样品间摩擦力增加；硅基片和复合薄膜表面的黏附力和摩擦力随着相对湿度的升高而增大；APTES/RE复合薄膜具有较低的摩擦系数及黏附力和显著的抗黏着及减摩效果，显示出其在微机构表面润滑中良好的应用前景.

关键词: 稀土, 自组装, 纳米摩擦学, 原子力显微镜

Abstract: APTES/rareearth composite film was fabricated on the singlecrystal silicon substrate by molecular selfassembly process. The structure of the composite films was characterized using ellipsometer, contact angle tester and Xray photoelectron spectroscopy (XPS).The adhesion and nanofriction properties of the composite films were investigated using atomic force microscope (AFM). The results indicate that APTES/RE film possesses a remarkable low friction coefficient and adhesion. Along with the increase of the scanning rate and load, the friction force between the probe and the film increases. The friction force and adhesion force increase with relative humidity increasing. APTES/RE composite film shows excellent antiadhesion property and wearresistance characteristic, indicating its promising applications in microelectromechanical system (MEMS) field.

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