上海交通大学学报

上海交通大学学报（自然版）

• 金属学与金属工艺 • 上一篇    下一篇

工艺参数对陶瓷激光热应力切割质量的影响

胡俊，曹倩倩，罗敬文
  

  1. （上海交通大学 机械与动力工程学院， 上海 200240）
  • 收稿日期:2010-03-26 修回日期:1900-01-01 出版日期:2011-01-27 发布日期:2011-01-27

Effect of Technological Parameters on LaserControlled Thermal Stress Cutting Quality of Ceramics

HU Jun,CAO Qianqian,LUO Jingwen
  

  1. (School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China)
  • Received:2010-03-26 Revised:1900-01-01 Online:2011-01-27 Published:2011-01-27

摘要： 建立了激光热应力切割有限元仿真模型，用于研究三维对称氧化铝陶瓷基片切割过程中的温度场和热应力场分布，以及激光功率、陶瓷厚度和切割速度等工艺参数对材料表面最高温度和应力的影响，并通过对比实验验证了该模型的正确性.结果表明，随着裂纹尖端的临界正应力增加，断裂表面的微裂纹加深，并引起材料表面的颗粒剥落，使得切割断面的粗糙度增大.

关键词: 陶瓷, 激光加工, 热应力切割, 可控断裂

Abstract: In order to study the distributions of temperature field and thermal stress field, a threedimensional axial symmetric model of alumina ceramic was established. This paper described the thermal stress’s variation of the cutting point and studied the influence of laser power, ceramic thickness and cutting speed on the temperature field and thermal stress field. The model was validated by comparative experiments. The results show that with the increase of the tensile stress, the microcrack becomes deeper, which induces more surface particles to run off, then the roughness increases.

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