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Sponsored by the Ministry of Education of the People's Republic of China
Directed by Shanghai Jiao Tong University
ISSN 1007-1172 CN 31-1943/U
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J Shanghai Jiaotong Univ Sci
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High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation
JIAO Ding (焦 鼎), NI Zao (倪 藻), WANG Jiachou (王家畴), LI Xinxin∗ (李昕欣)
J Shanghai Jiaotong Univ Sci . 2023, (
2
): 197 -206 . DOI: 10.1007/s12204-021-2288-2
