@article{XING Yaliang (邢亚亮):274, author = {[XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健), SUN Dianjun (孙殿俊), LIU Zhaoyang (刘朝阳), OU Bin (欧斌)]}, title = {Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators}, publisher = {J Shanghai Jiaotong Univ Sci}, year = {2017}, journal = {Journal of Shanghai Jiaotong University(Science)}, volume = {22}, number = {3}, eid = {274}, pages = {274-279}, keywords = {hemispherical resonator; wet etching; glassblowing; fused silica}, doi = https://xuebao.sjtu.edu.cn/sjtu_en/EN/10.1007/s12204-017-1832-6 }