A new hybrid method, which combines improved glass-blown technology with wet etching, is reported
to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to
achieve the resonators with good shell shape. The typical shell diameter is about 4mm and its thickness covers
from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at
different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness.
The corrosion solutions with different ratios of HF solution to NH4F solution make the spherical shells rougher in
different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness
is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing
spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch (BOE)
technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell
at ambient pressure and room temperature is 1.75 kHz of rocking mode which is close to the simulated frequency.
Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.
XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健),SUN Dianjun (孙殿俊), LIU Zhaoyang (刘朝阳), OU Bin (欧斌)
. Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators[J]. Journal of Shanghai Jiaotong University(Science), 2017
, 22(3)
: 274
-279
.
DOI: 10.1007/s12204-017-1832-6
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