Four kinds of ZrC coatings with nearly the same thickness have been successfully prepared on graphite
substrate by chemical vapor deposition (CVD) through controlling the ratio of inlet reacting gases. From backscattered
electron images, it can be inferred that ZrCIII coating has the best tightness of all coatings. Meanwhile, line
energy spectrum curve shows that zirconium and carbon elements distribute uniformly along the normal direction
of the ZrCIII coating. As for varied microstructures, the coatings show different mechanical properties and residue
stress. The strength and elastic modulus of ZrCIII coating were up to 89.57 and 1 192.5GPa, respectively. Those
make it near the level of diamond. Value of residue tensile stress of ZrC+C composite coating was only 7.729MPa
and that of ZrCIII coatings was 349.632 MPa. The strong combination of small-size grains in ZrCIII coating plays
a decisive role to the best mechanical properties. However, strong misfit of lattice between ZrCIII coating and
substrate can induce high residue stress.
SUN Weia* (孙威), XIONG Xianga (熊翔), LI Xiao-binb (李小斌), LI Guo-donga (李国栋)
. Mechanical Properties and Residue Stress of Four Kinds of ZrC Coatings Prepared by Chemical Vapor Deposition[J]. Journal of Shanghai Jiaotong University(Science), 2012
, 17(6)
: 706
-711
.
DOI: 10.1007/s12204-012-1350-5
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