c-C4F8/CF3I/CO2混合气体中正负沿面放电对比的数值研究
范彬海1, 2, 周小丽2, 钱勇3, 臧奕茗3
Numerical Study on Comparison of Negative and Positive Surface Discharge in c-C4F8/CF3I/CO2 Gas Mixture
FAN Binhai(范彬海), ZHOU Xiaoli(周小丽), QIAN Yong(钱勇), ZANG Yiming(臧奕茗)
J Shanghai Jiaotong Univ Sci
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2024, (2): 202
-215
.
DOI: 10.1007/s12204-022-2562-y