压膜空气阻尼调制的高性能单面制造(111)硅双悬臂梁加速度传感器
焦鼎, 倪藻, 王家畴, 李昕欣
High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation
JIAO Ding (焦 鼎), NI Zao (倪 藻), WANG Jiachou (王家畴), LI Xinxin∗ (李昕欣)
J Shanghai Jiaotong Univ Sci
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2023, (2): 197
-206
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DOI: 10.1007/s12204-021-2288-2