A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate
XU Zhong-xing (许仲兴), ZHANG Wei-ping*(张卫平), TANG Jian (唐健), ZHANG Gong (张弓),CHENG
A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate
XU Zhong-xing (许仲兴), ZHANG Wei-ping*(张卫平), TANG Jian (唐健), ZHANG Gong (张弓),CHENG Yu-xiang (成宇翔), CHEN Wen-yuan (陈文元), GUAN Ran (关冉)
上海交通大学学报（英文版）
.
2015, (3): 286
-292
.
DOI: 10.1007/s12204-015-1623-x