面向散热应用的碳化硅表面热丝化学气相沉积金刚石膜生长速率
Growth Rates of HFCVD Diamond Films on Silicon Carbide Substrates for Heat Dissipation Applications
面向散热应用的碳化硅表面热丝化学气相沉积金刚石膜生长速率 |
| 李维汉, 乔煜, 疏达, 王新昶 |
|
Growth Rates of HFCVD Diamond Films on Silicon Carbide Substrates for Heat Dissipation Applications |
| LI Weihan, QIAO Yu, SHU Da, WANG Xinchang |
| 图7 不同碳源浓度下制备金刚石的拉曼光谱 |
| Fig.7 Raman spectra of diamond prepared at different carbon concentrations |
|
|