非对称柔性支撑龙门双驱平台的解耦与同步控制

位广宇, 谷朝臣, 杨舒盛, 关新平

Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage

WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping

图7 龙门试验台在3种不同控制算法下对横梁轴负载余弦扰动的响应曲线

Fig.7 Comparison of system responses in sinusoidal load disturbances using model-compensated ESO control, non-compensated ESO control, and non-compensated PID control