非对称柔性支撑龙门双驱平台的解耦与同步控制

位广宇, 谷朝臣, 杨舒盛, 关新平

Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage

WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping

图3 使用中图SJ6000激光干涉仪测量的重复定位精度结果

Fig.3 Test result of repeated positioning accuracy using SJ6000 Laser Interferometer