差压式电容传感器膜片的变形分析与优化设计

赵昭, 雷华明

Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

ZHAO Zhao, LEI Huaming

图6 不同挠度线性偏差下低压端和高压端压力-电容特性曲线(h=0.05 mm)

Fig.6 Pressure-capacitance characteristic curves of low and high pressure parts at different deflection linear deviations (h=0.05 mm)