差压式电容传感器膜片的变形分析与优化设计

赵昭, 雷华明

Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

ZHAO Zhao, LEI Huaming

图4 不同S0下中心挠度线性偏差的变化

Fig.4 Variation of linear deviation of central deflection at different S0 values