差压式电容传感器膜片的变形分析与优化设计

赵昭, 雷华明

Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

ZHAO Zhao, LEI Huaming

图3 不同中心挠度线性偏差下的S0与Q的关系

Fig.3 S0 versus Q at different center deflection linear deviations