差压式电容传感器膜片的变形分析与优化设计

赵昭, 雷华明

Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

ZHAO Zhao, LEI Huaming

表3 500 Pa量程在不同膜厚和不同挠度线性偏差下的

Q 和 S_{0}

Tab.3

Q

and

S_{0}

of 500 Pa range at different membrane thicknesses and deflection linear deviations

h/ mm	q_max/ Pa	Q_max	δ= 5%		δ= 1%
h/ mm	q_max/ Pa	Q_max	S₀	N₀/ (N·m^-1)	S₀	N₀/ (N·m^-1)
0.02	500	1 372.32	289	489.3	514.6	871.3
0.03	500	271.08	93.3	533.1	168.5	962.9
0.04	500	85.77	40.6	549.9	74.9	1 014.5
0.05	500	35.13	20.5	542.3	39.1	1 034.4