差压式电容传感器膜片的变形分析与优化设计

赵昭, 雷华明

Deformation Analysis and Optimal Design of Membrane for Differential Pressure Capacitance Sensor

ZHAO Zhao, LEI Huaming

表2 FEA解和HAM解的中心挠度对比

Tab.2 Comparison of center deflection between FEA and HAM solutions

q/kPa N0/ (N·m-1) ω0/mm 结果 偏差/% FEM HAM 100 20 000 0.257 76 0.257 60 0.06 100 0 0.644 18 0.642 88 0.20 10 2 000 0.192 92 0.192 45 0.24 10 0 0.295 53 0.295 38 0.05 1 200 0.109 05 0.108 64 0.38 1 0 0.132 99 0.132 96 0.02