用于辅助柔性神经电极深度植入的槽形截面硅针的设计

贺雨欣, 张文光, 许李悦, 周旭晖

Design of a Grooved Cross-Section Silicon Needle for Assisting Deep Implantation of Flexible Neural Probe

HE Yuxin, ZHANG Wenguang, XU Liyue, ZHOU Xuhui

表2 槽形截面硅针与传统截面硅针的性能评价指数对比

Tab.2 Comparison of performance evaluation indexes of grooved cross-section and traditional cross-section

h1/μm P T1、T2的平均 优化率/% P T3、T4、T5的平均 优化率/% 槽形截面 T1 T2 T3 T4 T5 30 4.14 9.39 6.26 -47.09 3.26 2.10 3.91 33.98 40 7.66 9.09 10.67 -22.47 5.35 2.72 6.95 53.00 50 12.37 11.79 11.01 8.50 7.57 2.94 10.84 73.82 60 18.42 14.04 10.67 49.09 9.55 2.72 15.89 96.24 70 25.30 17.49 11.96 71.82 13.02 3.41 21.62 99.47