基于位移放大机构的压电快速反射镜设计

谢永, 刘重飞, 贾建军, 戴箭胜

Design of Fast Steering Mirror Based on Displacement Amplification Mechanism

XIE Yong, LIU Chongfei, JIA Jianjun, DAI Jiansheng

图10 x轴偏转角和拟合偏差

Fig.10 Deflection angle and fitting error of x axis