基于位移放大机构的压电快速反射镜设计
谢永, 刘重飞, 贾建军, 戴箭胜
Design of Fast Steering Mirror Based on Displacement Amplification Mechanism
XIE Yong, LIU Chongfei, JIA Jianjun, DAI Jiansheng
表2
有限元软件分析结果
Tab.2
Results of finite element method analysis
s
1
/μm
s
2
/μm
β
10
89.60
8.96
20
179.20
8.96
30
268.79
8.96
40
358.39
8.96
50
447.99
8.96
60
537.59
8.96