双向抗高过载微流体惯性开关
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张润铎, 聂伟荣, 丘伟祥
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Microfluidic Inertial Switch Capable of Bidirectional Anti-High Overload
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ZHANG Runduo, NIE Weirong, QIU Weixiang
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表1 开关主要结构参数
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Tab.1 Main structural parameters of the switches
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| 参数 | 取值 | | 模型1 | 模型2 | 模型3 | 模型4 | 模型5 | 模型6 | | b1/μm | 20 | 20 | 20 | 20 | 20 | 20 | | b2/μm | 300 | 300 | 300 | 300 | 300 | 300 | | b3/μm | 150 | 150 | 150 | 60 | 150 | 150 | | b4/μm | 20 | 25 | 25 | 25 | 35 | 25 | | l/μm | 250 | 250 | 50 | 250 | 250 | 250 | | h/μm | 50 | 50 | 50 | 50 | 50 | 50 | | ΔH/μm | 160 | 160 | 160 | 160 | 160 | 160 | | r/μm | - | - | - | - | - | 60 | | α1/(°) | -70 | -70 | -70 | -70 | -70 | -70 | | α2/(°) | 70 | 70 | 70 | 70 | 70 | 70 | | α3/(°) | -40 | -40 | -40 | -40 | -40 | -40 |
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