大藤峡人字闸门智能监控微机电系统传感器

谢子仪, 段力, 翁昊天

Intelligent Monitoring Micro-Electro-Mechanical-System Sensor of Herringbone Gate of Dateng Gorge

XIE Ziyi, DUAN Li, WENG Haotian

图3 薄膜电阻的几何结构与电场仿真

Fig.3 Geometry and simulation result of thin film resistor