大藤峡人字闸门智能监控微机电系统传感器

谢子仪, 段力, 翁昊天

Intelligent Monitoring Micro-Electro-Mechanical-System Sensor of Herringbone Gate of Dateng Gorge

XIE Ziyi, DUAN Li, WENG Haotian

图12 薄膜电阻不同角度下的相对误差

Fig.12 Relative errors of film resistance at different angles