大藤峡人字闸门智能监控微机电系统传感器
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谢子仪, 段力, 翁昊天
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Intelligent Monitoring Micro-Electro-Mechanical-System Sensor of Herringbone Gate of Dateng Gorge
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XIE Ziyi, DUAN Li, WENG Haotian
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表1 不同样品的薄膜实测电阻与相对误差
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Tab.1 Measured resistance and relative error of thin films of different samples
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镀铜
圆片 | r/cm | R/Ω | | ΔR/R | | | 测点1 | 测点2 | 测点3 | 测点4 | 测点5 | 测点6 | 测点1 | 测点2 | 测点3 | 测点4 | 测点5 | 测点6 | | 1 | 0.6 | 2.4 | 2.4 | 2.3 | 2.3 | 2.4 | 2.4 | | 1.4 | 1.4 | -2.8 | -2.8 | 1.4 | 1.4 | | | 1.25 | 4.0 | 3.9 | 3.9 | 4.1 | 4.0 | 4.1 | | -0.8 | -3.3 | -3.3 | 1.7 | -0.8 | 1.7 | | 2 | 0.7 | 12.6 | 12.6 | 12.5 | 12.6 | 12.5 | 12.7 | | 0.1 | 0.1 | -0.7 | 0.1 | -0.7 | 0.9 | | | 1.2 | 17.1 | 16.9 | 16.9 | 17.1 | 16.9 | 17.0 | | 0.7 | -0.5 | -0.5 | 0.7 | -0.5 | 0.1 |
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