V型电热驱动器理论模型及动态特性
陈浩, 王新杰, 王炅, 席占稳, 聂伟荣
Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator
CHEN Hao, WANG Xinjie, WANG Jiong, XI Zhanwen, NIE Weirong
表2
硅的材料参数
Tab.2
Material parameters of silicon
参数
取值
c
/(J·m
-1
·K
-1
)
787
κ
/(W·m
-1
·K
-1
)
60
k
v
/(W·m
-2
·K
-1
)
70
ρ
/(Ω·m)
2.3×10
-4
α
/K
-1
2.56×10
-6
E
/GPa
169
μ
0.28