Analytical equations are developed to calculate the static deflection of a circular diaphragm-type piezoactuator under loads of driving voltage and uniform resisting pressure. The solution is derived using the energy minimization method and the Rayleigh-Ritz method based on the Kirchhoff thin plate theory. The proposed solution is validated via the experimental measurements under loads of voltage only, pressure only, and combined loads of voltage and pressure, respectively. The analytical and experimental results agree within 9.3%, which suggests the solution is accurate. Based on the proposed equations, the effects of the radius ratio and thickness ratio of the lead zirconate titanate (PZT) layer to the passive layer on the actuator deflections are investigated. Moreover, the effects of the pressure loads on the actuator deflections are studied as well. The results indicate that there exist the optimal radius ratio and the optimal thickness ratio to generate maximum stroke volume. It is also observed that the diaphragm deforms reversely near the periphery under the pressure load when the actuator radius ratio is lower than 0.71, which weakens the actuator performance.
HU Yuanlin,WANG Wen
. Deflection of a Circular Diaphragm-Type Piezoactuator Under Loads of Voltage and Pressure[J]. Journal of Shanghai Jiaotong University, 2018
, 52(8)
: 883
-890
.
DOI: 10.16183/j.cnki.jsjtu.2018.08.001
［1］IVERSON B D, GARIMELLA S V. Recent advances in microscale pumping technologies: A review and evaluation［J］. Microfluidics and Nanofluidics, 2008, 5(2): 145-174.
［2］REIS N, AINSLEY C, DERBY B. Ink-jet delivery of particle suspensions by piezoelectric droplet ejectors［J］. Journal of Applied Physics, 2005, 97(9): 094903.
［3］NISAR A, AFZULPURKAR N, MAHAISAVARIYA B, et al. MEMS-based micropumps in drug delivery and biomedical applications［J］. Sensors and Actuators B: Chemical, 2008, 130(2): 917-942.
［4］何秀华, 张睿, 蒋权英. 基于MEMS的压电泵及其研究进展［J］. 排灌机械, 2007, 25(4): 64-68.
HE Xiuhua, ZHANG Rui, JIANG Quanying. Progress on piezoelectric micropump based on MEMS［J］. Drainage and Irrigation Machinery, 2007, 25(4): 64-68.
［5］WANG D H, HUO J. Modeling and testing of the static deflections of circular piezoelectric unimorph actuators［J］. Journal of Intelligent Material Systems and Structures, 2010, 21(16): 1603-1616.
［6］PRASAD S A N, GALLAS Q, HOROWITZ S, et al. Analytical electroacoustic model of a piezoelectric composite circular plate［J］. AIAA Journal, 2006, 44(10): 2311-2318.
［7］HU Y L, LIANG X, WANG W. Deflection of circular diaphragm-type piezoactuators coupling with gas compression in micropumps［J］. Microsystem Technologies, 2017, 23(12): 5329-5341.
［8］DESHPANDE M, SAGGERE L. An analytical model and working equations for static deflections of a circular multi-layered diaphragm-type piezoelectric actuator［J］. Sensors and Actuators A: Physical, 2007, 136(2): 673-689.
［9］LI S F, CHEN S C. Analytical analysis of a circular PZT actuator for valveless micropumps［J］. Sensors and Actuators A: Physical, 2003, 104(2): 151-161.
［10］WANG D A, CHENG C H, HSIEH Y H, et al. Analysis of an annular PZT actuator for a droplet ejector［J］. Sensors and Actuators A: Physical, 2007, 137(2): 330-337.
［11］胡院林, 梁鑫, 王文, 等. 能量平衡法静电驱动柔性振膜微泵特性分析［J］. 传感技术学报, 2016, 29(1): 15-20.
HU Yuanlin, LIANG Xin, WANG Wen, et al. Analysis on electrostatically actuated diaphragm micropump with energy equilibrium method ［J］. Chinese Journal of Sensors and Actuators, 2006, 29(1): 15-20.
［12］DOBRUCKI A B, PRUCHNICKI P. Theory of piezoelectric axisymmetric bimorph［J］. Sensors and Actuators A: Physical, 1997, 58(3): 203-212.
［13］CUI Q F, LIU C L, ZHA X F. Modeling and numerical analysis of a circular piezoelectric actuator for valveless micropumps［J］. Journal of Intelligent Material Systems and Structures, 2008, 19(10): 1195-1205.
［14］ARIK M, ZURN S M, BAR-COHEN A, et al. Design, fabrication, and characterization of thin film PZT membranes for high flux electronics cooling applications［J］. Smart Materials and Structures, 2005, 14(6): 1239-1249.
［15］TIMOSHENKO S P, WOINOWSKY-KRIEGER S. Theory of plates and shells［M］.
