非对称柔性支撑龙门双驱平台的解耦与同步控制
位广宇, 谷朝臣, 杨舒盛, 关新平
Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage
WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping
上海交通大学学报 . 2023, (5): 593 -600 .  DOI: 10.16183/j.cnki.jsjtu.2021.456