超声振动条件下碳化硅抛光过程的分子动力学模拟
翟文杰，杨德重，宫娜
Molecular Dynamics Simulation of Polishing Process of
Silicon Carbide Under Ultrasonic Vibration Conditions
ZHAI Wenjie，YANG Dezhong,GONG Na
上海交通大学学报（自然版）
.
2018, (5): 599
-603
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DOI: 10.16183/j.cnki.jsjtu.2018.05.015
