为克服传统柔性微定位平台在结构复杂性与空间占用方面的不足,同时确保其具备毫米级运动行程、高定位精度及优良的静、动态性能,首先,设计了一种新型3T1R自由度柔性运动副,其通过柔性杆的偏转变形实现位移传递,并以此为构型基础,构建了一种以单一运动副替代传统支链的三自由度平动柔性微定位平台。其次,基于柔性机构理论建模方法推导平台的静、动态特性理论模型。随后,针对平台的结构参数进行优化求解。最后,通过有限元分析对平台的理论模型进行仿真验证。结果表明:理论值与仿真值的总体趋势平滑且一致,平台前三阶固有频率与后三阶固有频率存在明显的频率分布区隔,在1 mm的运动行程内,各平动方向的丢失运动、耦合误差均控制在0.7 %以内。研究结果验证了新型柔性运动副及柔性微定位平台结构设计的合理性、理论模型的正确性,为柔性微定位平台的设计提供了新的结构创新路径。
To address the drawbacks of conventional compliant
micro-positioning platforms—namely structural complexity and excessive spatial
occupancy—while ensuring a millimeter-scale motion range, high positioning
accuracy, and favorable static and dynamic performance, this study proposes and
develops a novel 3T1R compliant kinematic pair. The pair transmits displacement
through the bending deformation of compliant beams, and, based on this
configuration, a new translational compliant micro-positioning platform with
three degrees of freedom is constructed, in which a single kinematic pair
replaces traditional multi-branch structures. On this basis, theoretical models
describing the static and dynamic characteristics of the platform are derived
using compliant mechanism modeling methods, and the structural parameters are
optimized to improve overall performance. Finite element analysis is
subsequently performed to validate the proposed theoretical models. The results
demonstrate that the theoretical predictions and simulation outcomes exhibit
smooth and consistent agreement. A clear separation is observed between the
first three and higher-order natural frequencies, and within a motion range of
1 mm, the parasitic motions and coupling errors in all translational directions
are effectively constrained within 0.7%. These findings confirm both the
rationality of the proposed compliant kinematic pair and the structural design
of the platform, as well as the correctness of the theoretical modeling
approach, thereby providing new theoretical foundations and design strategies
for the advancement of compliant micro-positioning platforms.