针对硅基U型和V型微电热驱动器在MEMS引信安全系统高过载使用环境中的应用，开展了微电热驱动器的抗高过载性能研究。以不同类型微电热驱动器在最高温度下拥有相同输出位移作为指标，确定了具有相同输出性能的U型和V型微电热驱动器的结构参数。并分别在不同方向、幅值和脉宽的冲击载荷下进行有限元仿真。由仿真结果得到两种驱动器各截面第一主应力值，根据单晶硅材料的许用应力确定针对两种微电热驱动器的冲击载荷脉宽-幅值临界曲线，以此将冲击载荷划分为安全载荷与失效载荷。搭建马希特锤冲击平台，对两种驱动器样机进行了多次冲击测试。结果表明：在脉宽为80μs -100μs的冲击载荷作用下，U型微电热驱动器在3781g-8036g的冲击载荷作用下发生断裂；而V型微电热驱动器可承受幅值18000g的冲击载荷不损坏，足以抵御引信安全系统跌落在硬目标上的勤务载荷。研究结果可为高过载环境下的微电热驱动器的选用、设计提供参考。

To prevent micro electrothermal actuators from becoming damaged under high overload conditions, this paper conducts research on the anti-high overload performance of U- and V-shaped micro electrothermal actuators. The structural parameters of U- and V-shaped micro electrothermal actuators with equivalent output performance were determined by evaluating different types of micro electrothermal actuators exhibiting the same output displacement at the highest temperature. Finite element simulations of the actuators were conducted to assess their performance under impacts in various directions, amplitudes, and pulse widths. The values of the actuators’ first principal stress were derived from the simulation results. The pulse width-amplitude curves were obtained when the first principal stress of the two types of actuators reached the allowable stress. These curves categorize the impact loads into safe loads and failure loads, thus enabling an evaluation of the resistance to high overloads of both actuators. The simulation results were validated through the execution of a series of machete hammer experiments. The finding of the research indicates that when subjected to loads with pulse width of 80μs-100μs, the U-shaped electrothermal actuators exhibited a fracture under an overload of 3781g-8036g. In contrast, the V-shaped electrothermal actuators have the capacity to withstand an overload of 18000g, which allows them to resist the impact of dropped ammunition on a solid surface. The findings of this research serve as a point of reference for the selection and design of micro electrothermal actuators in high overload environments.