以酸性蚀刻废液为原料，采用超临界水热合成法制备出稳定性好的纳米铜和氧化铜粉体。考察了不同加碱量对纳米氧化铜粉制备效果的影响，进行了除杂效果的实验验证，得到了氧化铜形貌控制机理，并分析了腐蚀对产物纯度的影响。结果表明：以除杂后酸性蚀刻废液为前驱物在优化后参数下制备的纳米铜和纳米氧化铜，平均粒径分别为82 和52 nm，纯度分别为99.4%和99.2%。建立起酸性蚀刻废液预处理的工艺流程，开发出以酸性蚀刻废液为前驱物的高纯纳米铜和纳米氧化铜合成工艺。并以处理量480 L/h的中试规模连续式装置为基础核算了技术经济性。

Stable copper and copper oxide nanoparticles were prepared by supercritical hydrothermal synthesis using acidic etching waste solution as raw material. Effect of different alkali additions on the preparation of copper oxide nanoparticles was investigated, verification experiment of the effect impurity removal was carried out. The control mechanism of copper oxide morphology was obtained, and the effect of corrosion on the purity of final products was analyzed. Experimental results show that under optimized parameters, copper and copper oxide nanoparticles prepared by using acidic etching waste liquid as precursor have average particle sizes of 82 nm and 52 nm and purities of 99.4% and 99.2%, respectively, after removal of impurities. Technological process for the pre-treatment of acidic etching waste was established, and the synthesis process of high-purity nano-copper and nano-copper oxide using acidic etching waste as precursor is developed. Finally, the technical economy was accounted on the basis of a pilot-scale continuous plant with a treatment capacity of 480 L/h.