针对压电陶瓷直驱式快反镜偏转角度受到压电陶瓷伸长量较小的限制,无法实现大转角的现状,设计了一款新型压电快反镜,采用二级杠杆式放大机构实现压电陶瓷微小位移的放大,并在放大机构上粘贴电阻应变片作为反馈传感器.实验结果表明,所设计的快反镜可实现大于50 mrad的机械偏转范围,同时闭环线性度优于0.5%,能够满足大范围、高精度光束指向的需求.

According to the current situation that the deflection angle of the piezoelectric ceramics direct drive fast steering mirror (FSM) is restricted by small elongation of piezoelectric ceramics and the large deflection angle cannot be realized, a novel piezoelectric FSM is designed. A two-stage lever-type amplification mechanism is adopted to realize the amplification of small displacement of piezoelectric ceramics and a strain gauge attached to the amplification mechanism is considered as the displacement sensor. The experimental results indicate that the deflection angle of the designed FSM is larger than 50 mrad, and the closed-loop linearity is below 0.5%, which satisfies the requirements of large deflection angle and accuracy pointing for light beam.