针对目前微镜驱动存在的一些问题，提出了一种基于PLZT(锆钛酸铅镧陶瓷)/PVDF(聚偏氟乙烯)驱动的非接触式微镜平移机构.首先根据非接触式微镜平移机构各功能部件来确定总体的设计方案.然后对微镜平移机构进行理论分析和设计计算，确定微镜平移机构的尺寸参数.最后对总体机构的位移、应力进行有限元分析.分析结果表明，光控微镜平移机构计算结果与模拟结果具有较好的一致性，验证了平移机构设计的合理性和可行性.基于PLZT/PVDF驱动的微镜平移机构可实现二维运动并对微镜进行精确有效的位移控制，具有响应速度快、非接触式、远程控制和无电磁干扰等优点，可应用于独立的工作环境中.
Aiming at the problems of the existent micro-mirror driving, a non-contact micro-mirror translational mechanism based on PLZT（lanthanum-doped lead zirconate titannate）/PVDF（polyvinylidene fluoride） driving was presented. First, according to the functional components of the translational mechanism of the non-contact micro-mirror, the overall design scheme is determined. Then the theoretical analysis and design calculation are carried out, and the size parameters are determined. At last, the finite element analysis of the displacement, stress of the mechanism are carried out. The analysis results show that the calculated results are in good consistency with the simulation results, and the rationality and feasibility of this translational mechanism are verified. The PLZT/PVDF driving micro-mirror translational mechanism can realize two-dimensional motion and control the displacement of micro-mirror precisely and effectively, and it has the advantages of fast response speed, non-contact, remote control and no electromagnetic interference, etc. Furthermore, the PLZT/PVDF driving translational mechanism can be used in independent working environment.
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