采用激光加工和抛光方法，在镜面抛光的4Cr13不锈钢基板上制备了凸起面积密度分别为35%、44%和58%的边缘未修形和边缘经圆滑修形处理的圆柱凸起织构，并采用溅射和射频化学气相法在织构表面沉积N、Si共掺杂类金刚石碳(N-Si-DLC)膜；采用球-盘式往复摩擦磨损试验机研究了边缘未修形和边缘修形的凸起织构化N-Si-DLC膜与316L不锈钢球在不同相对湿度(RH=15%，45%，75%)空气中的摩擦磨损性能；同时，基于有限元法分析了稳定摩擦阶段静态接触应力的分布情况.结果表明：边缘修形织构化N-Si-DLC膜的摩擦系数和磨损率均显著低于边缘未修形织构化N-Si-DLC膜，边缘修形效果与织构凸起面积密度有关，并影响织构的摩擦磨损性能；凸起面积密度为44%的边缘修形织构化DLC膜的减摩耐磨效果最佳；织构化DLC膜的摩擦磨损性能与织构边缘的最大接触应力密切相关，采用边缘修形可以大幅减小凸起织构边缘的最大接触应力，从而达到减摩耐磨的效果.
Normal and edge-profiled textured nitrogen and silicon co-incorporated diamond-like carbon (N-Si-DLC) films with protrusion area densities of 35%, 44% and 58% were prepared by laser ablation, polishing and sputter, RF-CVD methods. The tribological properties of the textured films against the 316L stainless steel ball in air environments under RH 15%, 45% and 75% were investigated by a ball-on-disk type reciprocating tribometer. The finite element method was used to analyze the stress distribution at the contact surfaces in the steady state of sliding. The results show that the edge-profiled textured N-Si-DLC films possess lower friction and wear compared to the normal textured films. The friction and wear showed positive relation to the maximum contact stress appeared at the edge of protrusions. By edge-profiling, the maximum contact stress and sequential friction and wear could be reduced markedly. The reduction effect of edge-profiling is closely related to the protrusion area density and the best effect was obtained for the films with a protrusion area density of 44%.
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