U型和V型微电热驱动器的抗高过载性能

doi:10.16183/j.cnki.jsjtu.2024.342

摘要/Abstract

摘要：

针对硅基U型和V型微电热驱动器在微机电引信安全系统高过载使用环境中的应用,开展微电热驱动器的抗高过载性能研究.以不同类型微电热驱动器在最高温度下拥有相同输出位移作为指标,确定具有相同输出性能的U型和V型微电热驱动器的结构参数,并分别在不同方向、幅值和脉宽的冲击载荷下进行有限元仿真.由仿真结果得到两种驱动器截面第一主应力值,根据材料许用应力确定针对两种微电热驱动器的冲击载荷脉宽-幅值临界曲线,以此将冲击载荷划分为安全载荷与失效载荷.搭建马歇特锤冲击平台,对驱动器样机进行多次冲击测试.结果表明:当脉宽为80~100 μs,U型微电热驱动器在3 781g~8 036g的冲击载荷作用下发生断裂;而V型微电热驱动器可承受幅值18 000g的冲击载荷不损坏,足以抵御引信安全系统跌落在硬目标上的勤务载荷.研究结果可为高过载环境下的微电热驱动器的选用、设计提供参考.

关键词: 微机电系统, U型电热驱动器, V型电热驱动器, 抗高过载, 有限元分析

Abstract:

To address the application of silicon-based U- and V-shaped micro electrothermal actuators in fuze safety system of micro-electromechanical system (MEMS) in high overload environments, this paper conducts a study on the anti-high overload performance of micro electrothermal actuators. The structural parameters of U- and V-shaped micro electrothermal actuators with equivalent output performance are determined by evaluating different types of micro electrothermal actuators exhibiting the same output displacement at the highest temperature. Finite element simulations of the actuators are performed to characterize actuator behaviors under impacts in various directions, amplitudes, and pulse widths. The first principal stress values of the actuators are derived from the simulation. The pulse width-amplitude curves are obtained when the first principal stress of the two types of actuators reaches the allowable stress, which categorizes the impact loads into safe loads and failure loads. Then, impact experiments are performed with various actuator prototypes on a Machete hammer impact experimental platform. The results indicate that when subjected to loads with pulse width of 80-100 μs, the U-shaped electrothermal actuators exhibit a fracture under an overload of 3 781g—8 036g, while the V-shaped electrothermal actuators can withstand an overload of 18 000g, allowing them to resist the impact of dropped ammunition on a solid surface. The findings serve as a reference for the selection and design of micro electrothermal actuators in high overload environments.

Key words: micro-electromechanical system (MEMS), U-shaped electrothermal actuator, V-shaped electrothermal actuator, anti-high overload, finite element analysis

中图分类号:

TH122

陈旺生, 曹云, 孔啸宇, 谢海鹏, 席占稳. U型和V型微电热驱动器的抗高过载性能[J]. 上海交通大学学报, 2026, 60(8): 1336-1344.

CHEN Wangsheng, CAO Yun, KONG Xiaoyu, XIE Haipeng, XI Zhanwen. Anti-High Overload Performance of U- and V-Shaped Micro Electrothermal Actuators[J]. Journal of Shanghai Jiao Tong University, 2026, 60(8): 1336-1344.

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样机编号	参数/μm	取值
U1	L_h	3200
U1	W_h	50
U1	L_c	2700
U1	W_c	340
V1	L	1500
V1	W	37
V2	L	4400
V2	W	40