大藤峡人字闸门智能监控微机电系统传感器

doi:10.16183/j.cnki.jsjtu.2020.102

摘要/Abstract

摘要：

底枢轴承作为重要水利结构的支撑与转动构件,其在转合操作中造成的磨损直接影响闸门的正常运作和可靠性.在恶劣的深水工作条件下,为了更好地监测轴承磨损量,利用微机电系统,设计一种新型的薄膜电阻型磨损量传感器;进行磨损量测量表征实验,并利用计算机仿真建模进行磨损量实验模拟;具体分析不同工况下的测量电阻与磨损参数之间的关系.结果表明:该传感器的制作和安装过程具有一定的可行性;实验与仿真结果基本吻合;在工况允许范围内,电阻越大,磨损量的测量精度越高.该传感器有望应用于大藤峡人字闸门底轴枢纽的智能监控,实现21世纪水利枢纽工程的物联网与智慧管理.

关键词: 大藤峡, 传感器, 磨损, 薄膜, 智能监控

Abstract:

Bottom pivot bearing acts as the supporting and rotating component of the important water conservancy structure. The wear in the turning and closing operation is directly related to the normal operation and reliability of the gate. To directly monitor the wear of the bearing under severe deep water working conditions, a novel thin film resistive wear sensor was designed and constructed by using the micro-electro-mechanical-system (MEMS) micro-manufacturing technology. The wear measurement and characterization experiments were conducted. Besides, a wear test was simulated by computer simulation modeling. The relationship between the measured resistance and the wear parameters under different working conditions was specifically analyzed. The results show that the production and installation process of the sensor is feasible, and the experimental results are basically consistent with the simulation results. In the allowable range of working conditions, as the resistance increases, the accuracy of wear measurement increases. The sensor is expected to be applied in the intelligent monitoring of the herringbone gate of Dateng Gorge, and realize the Internet of things (IoT) and intelligent monitoring of the water conservancy projects in the 21st century.

Key words: Dateng Gorge, sensor, wear, thin film, intelligent monitoring

中图分类号:

TP212
TV36

谢子仪, 段力, 翁昊天. 大藤峡人字闸门智能监控微机电系统传感器[J]. 上海交通大学学报, 2021, 55(11): 1401-1407.

XIE Ziyi, DUAN Li, WENG Haotian. Intelligent Monitoring Micro-Electro-Mechanical-System Sensor of Herringbone Gate of Dateng Gorge[J]. Journal of Shanghai Jiao Tong University, 2021, 55(11): 1401-1407.

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镀铜圆片	r/cm	R/Ω						ΔR/R
镀铜圆片	r/cm	测点1	测点2	测点3	测点4	测点5	测点6	测点1	测点2	测点3	测点4	测点5	测点6
1	0.6	2.4	2.4	2.3	2.3	2.4	2.4	1.4	1.4	-2.8	-2.8	1.4	1.4
	1.25	4.0	3.9	3.9	4.1	4.0	4.1	-0.8	-3.3	-3.3	1.7	-0.8	1.7
2	0.7	12.6	12.6	12.5	12.6	12.5	12.7	0.1	0.1	-0.7	0.1	-0.7	0.9
	1.2	17.1	16.9	16.9	17.1	16.9	17.0	0.7	-0.5	-0.5	0.7	-0.5	0.1