基于PLZT/PVDF复合驱动的光控微镜平移机构

doi:10.16183/j.cnki.jsjtu.2018.07.012

上海交通大学学报（自然版） ›› 2018, Vol. 52 ›› Issue (7): 837-844.doi: 10.16183/j.cnki.jsjtu.2018.07.012

基于PLZT/PVDF复合驱动的光控微镜平移机构

刘亚风，王新杰，陆飞，王炅

南京理工大学机械工程学院，南京 210094

出版日期:2018-07-28 发布日期:2018-07-28
通讯作者: 王新杰，男，副教授，博士生导师，电话（Tel.）：025-84315327；E-mail：xjwang@njust.edu.cn.
基金资助:
国家自然科学基金资助项目（51675282）

Light-Controlled Translational Mechanism of Micro-Mirror with PLZT/PVDF Hybrid Driving

LIU Yafeng,WANG Xinjie,LU Fei,WANG Jiong

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

Online:2018-07-28 Published:2018-07-28

摘要/Abstract

摘要： 针对目前微镜驱动存在的一些问题，提出了一种基于PLZT(锆钛酸铅镧陶瓷)/PVDF(聚偏氟乙烯)驱动的非接触式微镜平移机构.首先根据非接触式微镜平移机构各功能部件来确定总体的设计方案.然后对微镜平移机构进行理论分析和设计计算，确定微镜平移机构的尺寸参数.最后对总体机构的位移、应力进行有限元分析.分析结果表明，光控微镜平移机构计算结果与模拟结果具有较好的一致性，验证了平移机构设计的合理性和可行性.基于PLZT/PVDF驱动的微镜平移机构可实现二维运动并对微镜进行精确有效的位移控制，具有响应速度快、非接触式、远程控制和无电磁干扰等优点，可应用于独立的工作环境中.

关键词: PLZT(锆钛酸铅镧陶瓷)/PVDF(聚偏氟乙烯)驱动, 微镜平移机构, 微驱动, 非接触控制

Abstract: Aiming at the problems of the existent micro-mirror driving, a non-contact micro-mirror translational mechanism based on PLZT（lanthanum-doped lead zirconate titannate）/PVDF（polyvinylidene fluoride） driving was presented. First, according to the functional components of the translational mechanism of the non-contact micro-mirror, the overall design scheme is determined. Then the theoretical analysis and design calculation are carried out, and the size parameters are determined. At last, the finite element analysis of the displacement, stress of the mechanism are carried out. The analysis results show that the calculated results are in good consistency with the simulation results, and the rationality and feasibility of this translational mechanism are verified. The PLZT/PVDF driving micro-mirror translational mechanism can realize two-dimensional motion and control the displacement of micro-mirror precisely and effectively, and it has the advantages of fast response speed, non-contact, remote control and no electromagnetic interference, etc. Furthermore, the PLZT/PVDF driving translational mechanism can be used in independent working environment.

Key words: PLZT（lanthanum-doped lead zirconate titannate）/PVDF（polyvinylidene fluoride） driving, micro-mirror translational mechanism, micro-driven, non-contact control

中图分类号:

TP 241.3

刘亚风，王新杰，陆飞，王炅. 基于PLZT/PVDF复合驱动的光控微镜平移机构[J]. 上海交通大学学报（自然版）, 2018, 52(7): 837-844.

LIU Yafeng,WANG Xinjie,LU Fei,WANG Jiong. Light-Controlled Translational Mechanism of Micro-Mirror with PLZT/PVDF Hybrid Driving[J]. Journal of Shanghai Jiaotong University, 2018, 52(7): 837-844.

参考文献

［1］赵双双. 微光学集成的高精度 MOEMS加速度传感器研究［D］. 杭州: 浙江大学, 2013. ZHAO Shuangshuang. Research on high accuracy MOEMS accelerometer integrated with micro optics ［D］. Hangzhou: Zhejiang University, 2013. ［2］罗彪, 温志渝, 陈李, 等. MOEMS 扫描微镜的测试实验与分析［J］. 纳米技术与精密工程, 2012, 10(4): 307-312. LUO Biao, WEN Zhiyu, CHEN Li, et al. Experiment and analysis of MOEMS scanning microscope［J］. Nanotechnology and Precision Engineering, 2012, 10(4): 307-312. ［3］李海军. 基于光通信应用的MOEMS光学无源器件技术研究［D］. 长春: 吉林大学, 2007. LI Haijun. Research on MOEMS optical passive components based on optical communication ［D］. Changchun: Jilin University, 2007. ［4］YEOW J T W, YANG V X D, CHAHWAN A, et al. Micromachined 2-D scanner for 3-D optical cohe-rence tomography［J］. Sensors and Actuators A: Physical, 2005, 117(2): 331-340. ［5］HUNG A C L, LAI H Y H, LIN T W, et al. An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display［J］. Sensors and Actuators A: Physical, 2015, 222: 122-129. ［6］HAH D, HUANG T Y, TSAI J C, et al. Low-vol-tage, large-scan angle MEMS analog micro-mirror arrays with hidden vertical comb-drive actuators［J］. Journal of Microelectromechanical Systems, 2004, 13(2): 279-289. ［7］KOH K H, KOBAYASHI T, LEE C. Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications［J］. Sensors and Actuators A: Physical, 2012, 184: 149-159. ［8］BERNSTEIN J J, TAYLOR W P, BRAZZLE J D, et al. Electromagnetically actuated mirror arrays for use in 3-D optical switching applications［J］. Journal of Microelectromechanical Systems, 2004, 13(3): 526-535. ［9］IZHAR U, IZHAR A B, TATIC-LUCIC S. A multi-axis electrothermal micromirror for a miniaturized OCT system［J］. Sensors and Actuators A: Physical, 2011, 167(2): 152-161. ［10］Fridkin V M, Photoferroelectrics［M］. New York: Springer, 1979. ［11］于靖军, 裴旭, 毕树生, 等. 柔性铰链机构设计方法的研究进展［J］. 机械工程学报, 2010, 46(13): 2-13. YU Jingjun, PEI Xu, BI Shusheng, et al. State-of-arts of design method for flexure mechanisms［J］. Journal of Mechanical Engineering, 2010, 46(13): 2-13. ［12］贺磊, 吉晓民, 杨先海, 等. 并联Roberts柔性机构及其微定位平台的结构与位移分析［J］. 机械强度, 2015, 37(6): 1057-1063. HE Lei, JI Xiaomin, YANG Xianhai, et al. Structure and displacement analysis for compliant parallel Roberts mechanism and micro-positioning stage［J］. Journal of Mechanical Strength, 2015, 37(6): 1057-1063. ［13］宗光华, 裴旭, 于靖俊, 等. 一种新型柔性直线导向机构及其运动精度分析［J］. 光学精密工程, 2008, 16(4): 630-635. ZONG Guanghua, PEI Xu, YU Jingjun, et al. Novel compliant linear guiding mechanism and analysis of kinetic precision［J］. Optics and Precision Engineering, 2008, 16(4): 630-635. ［14］HUANG J H, WANG X J, WANG J. A mathematical model for predicting photo-induced voltage and photostriction of PLZT with coupled multi-physics fields and its application［J］. Smart Materials and Structures, 2016, 25(2): 025002. ［15］纪华伟. 压电陶瓷驱动的微位移工作台建模与控制技术研究［D］. 杭州: 浙江大学, 2006. JI Huawei. Micro-displacement worktable modeling and control technology driven by piezoelectric actuator［D］. Hangzhou: Zhejiang Uniersity, 2006. ［16］刘青. 柔性铰链四杆机构变形分析及仿真［D］. 兰州: 兰州理工大学, 2011. LIU Qing. Deformation analysis and simulation of flexible hinge four-bar linkage［D］. Lanzhou: Lanzhou University of Technology, 2011.

基于PLZT/PVDF复合驱动的光控微镜平移机构

Light-Controlled Translational Mechanism of Micro-Mirror with PLZT/PVDF Hybrid Driving

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