上海交通大学学报

上海交通大学学报（自然版）

• 自动化技术、计算机技术 • 上一篇    下一篇

一种以SU-8为流道材料的集成微流体

芦琦，陈翔，肖丽君，陈迪   

  1. (上海交通大学 微纳科学技术研究院， 上海 200240）
  • 收稿日期:2010-03-18 修回日期:1900-01-01 出版日期:2010-11-30 发布日期:2010-11-30

Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel

LU Qi，CHEN Xiang，XIAO Lijun，CHEN Di
  

  1. (Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200240 China)
  • Received:2010-03-18 Revised:1900-01-01 Online:2010-11-30 Published:2010-11-30

摘要： 根据微流量传感器测热式原理，利用Comsol多物理场模拟仿真软件，对微流量传感器进行模拟仿真，分析了流量传感器的关键参数对其灵敏性的影响.在此基础上，设计了一种集成在微流体管道内的微流量传感器.以离子束刻蚀方法制作微电极，SU8负光刻胶直接制作流道，将该负光刻胶与聚二甲基硅氧烷(PDMS)进行键合封装.最后，对该微流量传感器进行了流速测试.

关键词: 流量传感器, 负光刻胶, 微流体, 测热式原理

Abstract: A micro flow sensor integrated inside the flow channel was manufactured by using SU8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU8 and PDMS（polydimethylsiloxane）. According to the calorimetric theory, comsol, a multiphysics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors’ influences on its sensitivity. Then a micro flow sensor was designed and manufactured with MEMS technology. Finally, the flowvoltage testing of the micro flow sensor was executed.

中图分类号: