J Shanghai Jiaotong Univ Sci

J Shanghai Jiaotong Univ Sci ›› 2021, Vol. 26 ›› Issue (4): 454-462.doi: 10.1007/s12204-021-2315-3

• Automation Technology • Previous Articles     Next Articles

Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge

Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge

LEI Peng (雷鹏), ZHANG Congchun* (张丛春), PANG Yawen (庞雅文), YANG Shenyong (杨伸勇), ZHANG Meiju (张梅菊)   

  1. (1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University,
    Shanghai 200240, China; 2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical
    Engineering, Shanghai Jiao Tong University, Shanghai 200240, China; 3. AVIC Beijing Changcheng Aeronautical
    Measurement and Control Technology Research Institute, Beijing 100022, China)
  2. (1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University,
    Shanghai 200240, China; 2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical
    Engineering, Shanghai Jiao Tong University, Shanghai 200240, China; 3. AVIC Beijing Changcheng Aeronautical
    Measurement and Control Technology Research Institute, Beijing 100022, China)
  • Online:2021-08-28 Published:2021-06-06
  • Contact: ZHANG Congchun* (张丛春) E-mail:zhcc@sjtu.edu.cn

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Abstract: Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology and phase structure of the Karma alloy thin films were analyzed using X-ray diffraction and scanning electron microscopy. The effect of the annealing temperature on the performance of the Karma alloy thin film strain gauge was also investigated. As the annealing temperature increased, it was found that the resistivity of the thin films decreased, whereas the temperature coefficient of resistance (TCR) of the thin films increased. A Karma alloy thin film strain gauge was annealed at 200 °C, thereby obtaining a gauge factor of 1.7 and a corresponding TCR of 64.8 × 10-6 K-1. The prepared Karma alloy thin film strain gauge had a lower TCR than other strain gauges at room temperature. This result can provide a reference for the preparation and application of Karma alloy thin film strain gauges in specific scenarios.

Key words: thin film strain gauge| Karma alloy| magnetron sputtering| coefficient of resistance (TCR)| gauge factor

摘要： Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology and phase structure of the Karma alloy thin films were analyzed using X-ray diffraction and scanning electron microscopy. The effect of the annealing temperature on the performance of the Karma alloy thin film strain gauge was also investigated. As the annealing temperature increased, it was found that the resistivity of the thin films decreased, whereas the temperature coefficient of resistance (TCR) of the thin films increased. A Karma alloy thin film strain gauge was annealed at 200 °C, thereby obtaining a gauge factor of 1.7 and a corresponding TCR of 64.8 × 10-6 K-1. The prepared Karma alloy thin film strain gauge had a lower TCR than other strain gauges at room temperature. This result can provide a reference for the preparation and application of Karma alloy thin film strain gauges in specific scenarios.

关键词: thin film strain gauge| Karma alloy| magnetron sputtering| coefficient of resistance (TCR)| gauge factor

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